中央研究院 原子與分子科學研究所

Extreme ultraviolet (EUV) radiation with wavelengths of 10 – 121 nm has drawn considerable attention recently for its use in photolithography to fabricate nanoelectronic chips.  This study demonstrates, for the first time, fluorescent nanodiamonds (FNDs) with nitrogen-vacancy (NV) centers as scintillators to image and characterize EUV radiations.  The FNDs employed are ~100 nm in size; they form a uniform and stable thin film on an indium tin oxide-coated slide by electrospray deposition.  The film is non-hygroscopic, photostable, and can emit bright red fluorescence from NV⁰ centers when excited by EUV light.  An FND-based imaging device has been developed and applied for beam diagnostics of 50 nm and 13.5 nm synchrotron radiations, achieving a spatial resolution of 30 μm using a film of ~1 μm thickness.  The noise equivalent power density is 29 μW/cm²Hz^1/2 for the 13.5 nm radiation.  The method is generally applicable to imaging EUV radiations from different sources.