中央研究院 原子與分子科學研究所

Large-area MoS₂ atomic layers are synthesized on SiO₂ substrates by chemical vapor deposition using MoO₃ and S powders as the reactants. Optical, microscopic and electrical measurements suggest that the synthetic process leads to the growth of MoS₂ monolayer. The TEM images verify that the synthesized MoS₂ sheets are highly crystalline.