Fabrication of anodic-alumina films with custom-designed arrays of nanochannels
N.-W. Liu, A. Datta, C.-Y. Liu, C.-Y. Peng, H.-H. Wang, Y.-L. Wang
Adv. Materials 17, 222-225 (2005)
Focused ion beam (FIB) lithography can be used to selectively close nanochannels in an ordered array on an anodic-alumina film, producing templates with the nanochannels arranged in custom-designed geometries. Nanochannel closing can be monitored by in-situ FIB imaging. Nanodevices such as photonic-crystal waveguides could be fabricated using this technique.